Reliability of MEMS

Другие книги автора:

Resonant MEMS. Fundamentals, Implementation, and Application

Thermoelectric Energy Conversion. Basic Concepts and Device Applications

Micro Energy Harvesting

System-level Modeling of MEMS

Micro- and Nanomanipulation Tools

Enabling Technologies for MEMS and Nanodevices. Advanced Micro and Nanosystems

Micro Process Engineering. Fundamentals, Devices, Fabrication, and Applications

Microengineering of Metals and Ceramics, Part I

Micro and Nano Scale NMR

CMOS - MEMS